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Determination of the normalized surface height autocorrelation function of a two-dimensional randomly rough dielectric surface by the inversion of light scattering data

机译:确定归一化表面高度的自相关函数   二维随机粗糙介质表面的反转   光散射数据

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摘要

An expression is obtained on the basis of phase perturbation theory for thecontribution to the mean differential reflection coefficient from the in-planeco-polarized component of the light scattered diffusely from a two-dimensionalrandomly rough dielectric surface when the latter is illuminated by s-polarizedlight. This result forms the basis for an approach to inverting experimentallight scattering data to obtain the normalized surface height autocorrelationfunction of the surface. Several parametrized forms of this correlationfunction, and the minimization of a cost function with respect to theparameters defining these representations, are used in the inversion scheme.This approach also yields the rms height of the surface roughness, and thedielectric constant of the dielectric substrate if it is not known in advance.The input data used in validating this inversion consists of computersimulation results for surfaces defined by exponential and Gaussian surfaceheight correlation functions, without and with the addition of multiplicativenoise, for a single or multiple angles of incidence. The reconstructionsobtained by this approach are quite accurate for weakly rough surfaces, and theproposed inversion scheme is computationally efficient.
机译:基于相位扰动理论,可以得到当二维随机粗糙电介质表面被s偏振光照射时,从二维随机粗糙电介质表面漫射散射的光的面内共偏振分量对平均微分反射系数的贡献的表达式。该结果为反转实验光散射数据以获得表面的归一化表面高度自相关函数的方法奠定了基础。该相关函数的几种参数化形式以及相对于定义这些表示形式的参数的成本函数的最小化,都用于反演方案中。该方法还可以得出表面粗糙度的均方根高度,以及介电基片的介电常数验证这种反演时使用的输入数据包括由计算机模拟结果,该结果由指数和高斯表面高度相关函数定义,对于单个或多个入射角,不添加乘法噪声且不添加乘法噪声。通过这种方法获得的重建对于弱粗糙表面非常准确,并且所提出的反演方案在计算上是有效的。

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